DEEN
Thermometer

Current research projects

Image All-in-one device for freeze-drying and production of biomaterial
Image Influenced melting point of water by magnetic field
Image Software modules
Image Lifetime prediction of hermetic compressor systems
Image Verification of storage suitability of cryo tubes
Image Reducing the filling quantity
Image Software for technical building equipment
Image Performance tests of refrigerant compressors
Image Air-flow test rig for fan characteristic measurement
Image Combined building and system simulation
Image Low temperature – test facilities
Image Characterisation of Superconductors in Hydrogen Atmosphere
Image Service offer for Leak Detection and Tightness Test
Image Thermostatic Expansion Valves
Image Innovative small helium liquefier
Image 3D - Air flow sensor

You are here:   /  Home


Mass Spectrometer

Gunar Schroeder

+49-351-4081-5129

Determining the composition of gas mixtures in the high or ultra-high vacuum range

Mass spectrometry is a method for determining the composition of gas mixtures in the high or ultra-high vacuum range. It can be used to carry out qualitative and quantitative gas analyses and leak detection or to determine trace contamination.

The individual neutral gas particles are ionized by an electron impact ion source and separated from each other in an electric quadrupole field according to their mass-to-charge ratio. The filtered ions are then recorded by a detector. The ion current detected is proportional to the partial pressure of the respective gas component. For a more precise quantitative gas analysis, the relatively operating measuring instrument can be calibrated with a calibration gas.

The test set-up consists of a test chamber with a connected turbo-molecular-pump and fore vacuum pump. The mass spectrometer requires a vacuum <1,5×10-7 psi (<1×10-5 mbar) to be able to measure with high precision. The mass spectrometer and a vacuum sensor are mounted on the test chamber. The mass spectrometer is connected to a measuring PC with corresponding software.

Available measurement modes are:

  • Vacuum analysis, to determine residual gas components, evaluation as a plot of ion current and mass
  • Leak detection, with helium or another tracer gas, the ion current of the tracer gas or the corresponding mass is recorded and plotted over the time
  • Mass spectrum, evaluation of ion current and mass with user-defined specifications and time trend
Paramter Test value
Analysis Vacuum analysis, leak detection, mass spectrum, trace contamination
Detectable gases H2, He, N2, H2O, O2, CO2 usw.
Mass range 1 – 100 Da (1,66×10-27 – 1,66×10-25 kg)
Detection limit 1.5×10-15 psi / 3×10-13 mbar
Min. vacuum pressure and max. temperature range <7.3×10-6 psi / 5×10-4 mbar, < 150°C / 302°F
Experimental set-up for gas analysis with mass spectrometer
Experimental set-up for gas analysis with mass spectrometer

[Translate to EN:]

show full article

Your Request

Data Privacy Settings

Cookies are used on our website. Some of them are mandatory, while others enable us to improve your user experience on our website.

Get more info about used cookies